1.17.7-21.5负责ASH,Bevel, Vapor ETCH,Backside 机台,作为team leader,参与19nm cell meeting,参与PH rwk优化。20年12月代表部门参加Fab技术论坛。2.21.5-至今负责SWC TEL和DNS机台,作为staff engineer负责SWC机台的cost down和2nd source的引入,参与19nm MOL loop meeting。在21年第一季度获得企业文化优秀团队,第四季度获得长鑫英雄团队三等功。3.22.5-至今,负责WET部门产能业务,专利业务,2nd source 评估,22年6月完成长鑫内部讲师认证,负责OEC新人<有效沟通>课程培训,22年7月获得长鑫技术有限公司专利评审专家库专家
负责 ASH, Dry Bevel, WET Bevel, Backside Strip, Vapor ETCH tool start up and trouble shooting set up. 2.2019.04-2020.04:CXMT WET PE3 team leader. Level: L10 负责 PH RWK 优化,19nm DRAM CELL Loop WET contact window,Line yield improvement 刘浩东 简历 3.2020.4 -2021.04:CXMT WET PE2 team leader. Level: L9-B 负责 DNS ,TEL SWC Tool CAPA improvement and cost down. 19nm DRAM MOL WET contact window. Fab contamination committee owner. I Live system develop WET owner. ESP system develop WET owner. 4.2021.04 – 至今,CXMT WET Project Specialist. Level: L9-A 负责管理 WET 产能;WET IPA, H2O2,LAL800,LAL30,SP500,SP5000,HF,NH4.H2O 2nd source 导入; WET SWC cost down project,(SPM process optimize,DSP process optimize, LAL reclaim function development;) Tool localization evaluation (ACM/PNC/BEST) ,WET IP management.