主要针对多层铜互连铜膜CMP抛光液与阻挡层CMP抛光液的研发
2018.11 北京微电子国际研讨会暨IC WORLD大会 北京亦创国际会展中心
⚫ 针对设计、制造、工装、测试、装备、零部件及材料全产业环节的集成电路产业集群进行了行业交流
2019.5 中国平坦化技术大会暨海峡两岸平坦化技术研讨会 中科院上海微系统与信息技术所
⚫ 针对铜互连CMP抛光液性能的改善与碟形坑、THK等参数的控制进行了汇报展示
科研成果
[1] N. Zeng, H. Zhao, Y. Liu et al. An optimized passivation mechanism at the copper film recess for achieving
efficient planarization of copper chemical mechanical polishing, Materials Science in Semiconductor
Processing, (2021) 106321.[SCI Q1]
[2] N. Zeng, H. Zhao, Y. Liu et al. Roles and mechanistic analysis of adenine as a green inhibitor in chemical
mechanical polishing, Journal of Applied Electrochemistry, 51 (2021) 1479-1489. [SCI Q3]
[3] N. Zeng, H. Zhao, Y. Liu et al. Optimizing of the Colloidal Dispersity of Silica Nanoparticle Slurries for
Chemical Mechanical Polishing, Silicon, (2021). [SCI Q3]