Successfully develop FBEOL 0.13um, 90nm, 65nm, 55nm, 45nm
BOAC( Bonding Over Active Circuit) processBOAC project risk mitigation by stress simulation and nanoindentation
45nm FBEOL(WB,FC) test vehicle development and verification
Ramp up 0.13um BOAC product mass production : (cost down ~30%)Establish 90nm copper pad direct bump technology
Coordinate 90nm GF FBEOL(WB,FC) technology development