主要负责Metal film研发工作,主攻ECP技术,熟悉Barrier/seed
/Co layer和CVD相关film的制备工艺
参与 14nm 以下先进节点,负责BEOL metal M1-TM Cu ECP工艺研发,解决研发过程中出现的defect/电性问题
参与先进节点1x metal ECP国产机台设备与工艺优化
研经历

采用等离子喷涂技术制备高熔点氧化物涂层,表征涂层基本热学、力学性能,建立相关数据库
采用等离子体火焰和高能量密度激光,研究涂层高温热响应行为,深入分析了影响涂层抗烧蚀性能各种因素
以氧化物涂层考核结果为基础,设计超高温涂层体系,通过了项目中的风洞考核指标
中芯国际期间——最新节点1x Metal Cu seed reflow + ECP 工艺实现 参与者,ECP工艺owner
最新节点gapfill issue owner,负责优化工艺条件,解决影响良率的metal 相关defect
BEOL High resistance layer film process owner,Film dep 工艺 owner
1. Xiaohui Pan, Yaran Niu, Xueting Xu et al. Long time ablation behaviors of designed ZrC-SiC-TiC ternary coatings
for environments above 2000 °C, Corrosion Science, 2020,170: 108645
2. Xiaohui Pan, Chong Li, Yaran Niu et al. Effect of tungsten-containing additives (WB/ WSi2/ W) on ablation
behavior of ZrB2-SiC coating, Corrosion Science, 2020, 168: 108560
3. Xiaohui Pan, Chong Li, Yaran Niu et al. Effect of Yb2O3 addition on oxidation/ablation behaviors of ZrB2-MoSi2
composite coating under different environment, Corrosion Science, 2020, 175: 108882
4. Xiaohui Pan, Yaran Niu, Tao Liu et al. Ablation behaviors of ZrC-TiC coatings prepared by vacuum plasma spray:
Above 2000 °C, Journal of The European Ceramic Society, 2019, 39: 3292-00
5. Xiaohui Pan, Yaran Niu, Tao Liu et al. Ablation resistance and mechanism of ZrC-SiC-Yb2O3 ternary composite
coatings fabricated by vacuum plasma spray, Journal of The European Ceramic Society, 2019, 39: 3604-12
6. Xiaohui Pan, XueTing Xu, Yaran Niu et al. Relationship analysis on particle-coating-ablation property of UHTC
coatings fabricated by plasma spray technique, Ceramic International, 2021, 47:3808-15
1. 牛亚然、潘孝辉等 《一种耐高温抗烧蚀复合涂层及其制备方法》201910792010.6
2. 牛亚然、刘涛、潘孝辉等 《一种耐高温抗烧蚀复合涂层及其制备方法》ZL 2018 1 0461631.1 (已授权)